Lithography Process Control

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Lithography Process Control

Lithography Process Control

Name: Lithography Process Control
ISBN: 9780819430526

Harry J. Levinson

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Covers lithography process control at several levels, from fundamental through advanced topics. Self-contained tutorial works both as an introduction to the technology and as a reference for the experienced lithographer. Reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback.

Contents

- Preface
- Introduction to the use of statistical process control in lithography
- Sampling
- Simple and complex processes
- Linewidth control
- Overlay
- Yield
- Process drift and automatic process control
- Metrology
- Control of operations

श्रेणियाँ:

Engineering

साल:

1999

प्रकाशन:

SPIE Publications

भाषा:

english

पृष्ठ:

190

ISBN 10:

0819430528